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15.1. INTRODUCTION TO SURFACE PROFILERS Over the last 25 years driven by both the development of new technologies such as fast computers and solid state devices and the necessity to precisely inspect these increasingly tiny engineering surfaces, the eld of surface metrology has exploded in both its technological sophistication and its range of application. Advances in illumination sources, such as lasers, and in solid state detectors and optoelectronic devices in general have fueled the development of a wide range of instruments that can not only map surface topography but also determine other features such as displacement or dispersion. Innovative techniques and technologies have greatly increased the range of measurable objects, so now even dif cult surfaces with high slopes or steps and narrow, deep trenches can be measured. Many of these surface pro ling techniques were developed from distance measuring or focus detection techniques, and they often require scanning to obtain the surface pro le. This chapter describes instruments such as the stylus pro ler, scanning probe microscope, confocal microscope and the interferometric optical pro ler that are most often used to determine surface topographies of not only very small, typically engineering surfaces, but also smooth and large surfaces such as aspheres and glass plates. The rst part of this chapter describes scanning probe microscopes and stylus pro lers. Then optical methods are detailed with a speci c focus on techniques developed over the last 15 years that have found commercial and industrial application. This section describes both interference microscopes that employ both monochromatic and white light illumination and also confocal microscopes that have recently been fairly used to measure engineering surfaces. The next part of this chapter reviews work done in multiple wavelength interferometry, namely two and multiple wavelength, wavelength scanning, and spectrally resolved white light

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The IRS recognized that the differences between an advertisement and corporate sponsorship is [sic] further complicated in the Internet environment. The agency noted that it is not uncommon for a tax-exempt organization to have all or part of its Web site corporately sponsored. This financial support may be acknowledged through display of a corporate logo, notation of the sponsor s Web site address and/or 800 number, a moving banner, or hypertext link. In an understatement, the IRS stated that, [g]enerally, exempt organizations prefer to view payments as corporate sponsorship rather than advertising income, which is more likely to be subject to unrelated business income tax. The agency wrote that the use of promotional logos or slogans that are an established part of a spon-

Baun, W. L. (1981). Ion scattering spectrometry: a versatile technique for a variety of materials. Surf. Interf. Anal., 3, 243 250. Budd, P. M. and Goodhew, P. J. (1988). Light-element analysis in the transmission electron microscope: WEDX and EELS. Oxford University Press, Oxford, UK. Castle, J. E. and Castle, M. D. (1983). Simultaneous XRF and XPS analysis. Surf. Interf. Anal., 5, 193 198. Chu, W. K., Mayer, J. W. and Nicolet, M.-A. (1978). Backscattering spectrometry. Academic Press Inc., New York, USA. Clarke, N. S., Ruckman, J. C. and Davey, A. R. (1986). The application of laser ionization mass spectrometry to the study of thin films and near-surface layers. Surf. Interf. Anal., 9, 31 40. Degreve, F., Thorne, N. A. and Lang, J. M. (1988). Metallurgical applications of SIMS. J. Mater. Sci., 23, 4181 4208. Goodhew, P. J. and Castle, J. E. (1983). A survey of physical examination and analysis techniques. Inst. Phys. Conf. Ser. No. 68 (EMAG), pp. 515-522. Goodhew, P. J. and Humphreys, F. J. (1988). Electron microscopy and analysis. Taylor and Francis Ltd, London, UK. Vickerman, J. C. (1987). Secondary ion mass spectrometry. Chemistry in Britain, 10, 969-974. Vickerman, J. C. and Briggs, D. (2001). ToF-SIMS surface analysis by mass spectrometry. IM Publications, Chichester, UK/Surface Spectra, Manchester, UK. Walls, J. M. (1989). Methods of surface analysis. Cambridge University Press, Cambridge, UK. Werner, H. W. and Garten, R. P. H. (1984). A comparative study of methods for thin-film and surface analysis. Rep. Prog. Phys., 47, 221-344.

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